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Item Information
Item no. 12616 Section Category FAB / Etcher Date 2012-09-18 18:50:18
Item AMAT Centura 5200 DPS+ Metal Etcher (under Refurbishmnet)
Images
[Spec]
 System Confi..
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¡Ø When click the image, you can view lager image.
Description Serial No : EA61
Vintage : 1999
Spec : Under Refurbishiment [Full refurbishment : Middle of March]
Mainframe : Centura I_ Phase II
Load Lock : Narrow Body
Chamber :
2 x DPS+ Metal
2 x ASP+
VHP+ Robot


** Pump & Chiller is optional
Price
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Attached Doc.
 System Configuration_Surplus_DPS+ Metal Etch_15Dec2011.pdf
Attached Pic.
 
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