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Item Information
Item no. 15491 Section Category FAB / Etcher Date 2012-08-30 14:31:30
Item AMAT Centura 5200 eMax Oxide
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Description Serial No : 403245
Vintage : 2003
Spec : Applied Materials Centura 5200 (eMax)
Maker:AMAT
Model: Centura II 5200 eMAX system
Wafer size: 8 inch,
Main Frame: Centura II Body.
Loadlock:NBLL
Chamber: 3x eMAX, Orienter,
Robot: VHP


** Pump & Chiller is optional
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