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Item Information
Item no. 15581 Section Category FAB / PVD Date 2012-08-30 14:31:30
Item Ulvac Ceraus ZX-1000 METAL1
Images
[Spec]
 103 ULVAC ZX..
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Description Serial No : SE96-9611-1
Vintage : 1996
Spec : One single arm robot(Rorze RP700L)
Two Load/Unload chambers
Two Cassette stage with Mapping fuction.
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Attached Doc.
 103 ULVAC ZX1000 inspection.xls
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