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Item Information
Item no. 15660 Section Category FAB / CMP Date 2012-11-21 12:33:21
Item AMAT Mirra Mesa CMP (Full refurbished)
Images
[Spec]
 201109052000..
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※ When click the image, you can view lager image.
Description Serial No : L514
Vintage : 1999
inch : 8
Spec :
- Full refurbished
- Wafer : 200mm / SNNF
- Process : Oxide
- Mirra Polisher :TITAN II Profiler head & UPA x 4
- MESA Cleaner :
* Megasonic: Semi Pressurized
* Scrubber 1 & 2 Delivery Type : Direct type
Price
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Attached Doc.
 20110905200029_Mirra_MESA_SPEC.xlsx
Attached Pic.
 
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