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Item Information
Item No. 15491 Section Category FAB / Etcher Date 2012-08-30 14:31:30
Item AMAT Centura 5200 eMax Oxide
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AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide
[Spec]
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Description Serial No : 403245
Vintage : 2003
Spec : Applied Materials Centura 5200 (eMax)
Maker:AMAT
Model: Centura II 5200 eMAX system
Wafer size: 8 inch,
Main Frame: Centura II Body.
Loadlock:NBLL
Chamber: 3x eMAX, Orienter,
Robot: VHP


** Pump & Chiller is optional
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AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide AMAT Centura 5200 eMax Oxide
 
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