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[SG12573] TEL UnityⅡ e85 DS_ETCHER 

Item No
FAB / Etcher
2010-05-03 13:15:03
Model: UnityⅡ e85 DS_
Serial No : U02010
Vintage: 2001
ECC Rack: V-2 Rack
Wafer size: 8 Inch
Chamber : 2 chamber SCCM
Robot Arm: Ceramic
ESC: Ceramic

* Dry Pump and Chiller are not Include.
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