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[SG12651] TEL UnityⅡ e85 DI ETCHER(OXIDE) 

Item No
FAB / Etcher
2010-05-03 12:07:03
Serial No : U01310
Vintage : 1999
Spec : M7ETI301
ECC Rack: V-1 Rack
Wafer size: 8 Inch
Chamber : 2 chamber IEM
Robot Arm: Ceramic
ESC: Polyimide ESC

* Dry Pump and Chiller are not Include.
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