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[SG12659] TEL UnityⅡ e85 DS ETCHER 

Item No
FAB / Etcher
2010-05-03 12:00:03
Serial No : U02285
Vintage : 2004
Spec : M7ETSD05
ECC Rack: V-2 Rack
Wafer size: 8 Inch
Chamber : 2 chamber SCCM
Robot Arm: Ceramic
ESC: Ceramic

* Dry Pump and Chiller are not Include.
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