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[SG22134] Novellus VECTOR PECVD 

Item No
22134
Category
FAB / CVD
Date
2014-02-19 09:51:19
Serial Number
03-10-C30219
Vintage
2003
Wafer Size
12
Configuration
PE CVD , 2 Foup,HF Apex5513, LF PDX2500, MC3,MKS RPS(AX7645RH-10),New type spindle ass'y, SHi4/H2/Ar/N2/NH3/NF3/N2O,
Price
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Contact Info
SurplusGLOBAL Korea Tel : 82-31-615-6800
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