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FAB > Metrology

[SG22934] KLA-Tencor KLA2138 Bright field Inspection 

Item No
FAB / Metrology
2013-12-11 19:31:11
Serial No: W21xx1217
Vintage: 1999
WaferSize: 8
Specification: 1 SMIF and Open cassett type
Software: NT Version.
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