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[SG12652] TEL UnityⅡ e85 DS ETCHER 

FAB / Etcher
2010-05-03 12:04:03
Serial No : U01798
Vintage : 2001
Spec : M7ETS603
ECC Rack: V-2 Rack
Wafer size: 8 Inch
Chamber : 2 chamber SCCM
Robot Arm: Ceramic
ESC: Ceramic

* Dry Pump and Chiller are not Include.
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