Home > FAB > Etch

FAB > Etch

[SG24550] LAM TCP9600SE Dry Etch 

물품번호
24550
카테고리
FAB / Etch
날짜
2015-08-18 14:08:18
웨이퍼 사이즈
6
구성
TCP 9600 SE, some tool details: ? 3 Advanced Energy generator’s : 2.4 kW, calibrated to 1.25 kW at 10 Volts ? Turbomolecularpump : Alcatel ATH 1300 ? Pendulum Mainchamber Valve : VAT ? Pressure measurement : Mainchamber Baratron: 100mTorr / type E 29B MKS ? WVDS automatic supply system upgrade incl. (water vapor delivery system) ? APM and DSQ original LAM parts ? ESC chuck installed , no top clamping Tool on 6 “ , 8” conversion possible The tool is still in Fab (on cold idle) and can be audited.
가격
Please login and contact seller
등록자에게 문의하기
SurplusGLOBAL Korea Tel : 82-31-615-6800
회원가입하시면,
장비 담당자와 직접 연락하실 수 있습니다.