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[SG24777] Lam SEZ SP203 spin etcher 

물품번호
24777
카테고리
FAB / WET
날짜
2015-09-02 18:23:02
설명
■ Machine General Information
System Type SEZ 203
Serial Number 00457
Voltage 208 VAC/3P, 50/60 Hz
Max. Current 60 A
■ System Information
Wafer Size 8 inch
Indexer Type : SMIF type but we can modify by open cassette type.
Handling Type ECO End-Effector Aluminum
Main Unit 203
Load ports Manual Load ports (shutter)
Robot end effector ECO End-Effector Aluminium
Swivel lever ECO Swivel lever Front side and Backside
Chuck 200/200/200 (for 8” wafer in 8”process chamber)
Pre Flush Yes (Medium Rinse for process start)
FFU Type Mini Enviroment
Heating System Heater for CDS1
Watt: 2300 W, Volt: 203 VAC, Hz: 50/60
Heater for CDS2
Watt: 2300 W, Volt: 203 VAC, Hz: 50/60
Heater for CDS3
Watt: 2300 W, Volt: 203 VAC, Hz: 50/60* 2 (Double)

CDS System 3 CHC Cabinets
CDS #1 Buffer tank with dosing pump
Process tank for 40Liter
Manual filling
CDS #2 Buffer tank with dosing pump
Process tank for 40Liter
Manual filling
CDS #3 Buffer tank with dosing pump
Mixing tank
Process tank for 40Liter
Manual filling

■ Option
1. Ionizer :Yes
2. Chuck N2 control : MFM (only Reading)
3. Concentration Monitor :Horiba for Med #1

■ Chemical System
1. Filter Type 10 inch Millipore Guardian
2. Pump System
UNIT Process Return Mix Fill
CDS #1 PS 20 MA, PE 20 MA, NONE, ALMATEC A10TIZ
CDS #2 PS 20 MA, PE 20 MA, NONE, ALMATEC A10TIZ
CDS #3 PS 20 MA, PE 20 MA, PE 10 MA, ALMATEC A10TIZ
3. Chemical Fill Type Canister Fill for CDS #1, #2, #3
Mix Fill for CDS #3 (Paddle Wheel & Dosing Pump)
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