Home > FAB > Etch

FAB > Etch

[SG29732] APPLIED MATERIALS 300MM CENTURA AP ENABLER E5 OXIDE ETCH (FEOL-E5) AMAT 

물품번호
29732
카테고리
FAB / Etch
날짜
2015-07-28 16:57:28
설명
APPLIED MATERIALS 300MM CENTURA AP ENABLER E5 OXIDE ETCH (FEOL-E5) AMAT

Unit's Specifics

Make: Applied Materials (AMAT)
Model: Centura AP Enabler FEOL-E5

Factory Interface (FI):
- Gas Box (DeviceNet MFCs, Top Exhaust)
- ATM Robot
- Status Lamp
- Load Ports: 3
- Side Storage Buffer (SSB) Ports: 1

Centura AP Mainframe (M/F):
- Transfer Module: VTM Robot & SWLL

Load Locks:
- LLA: AP SWLL
- LLB: AP SWLL

Dielectric E5 Etching Chamber - Etching Chambers with E-cart (Ch-A/Ch-B/Ch-C/Ch-D)
- RF Match Type: Daihen
- RF Power Supply: Advanced Energy Ovation
- Gate Valve: Nor-Cal
- Turbo Pump: Shimadzu TMP
- RF and Power Cables

Heat Exchangers/ Chillers (6 units)
- Make: Advanced Thermal Sciences (ATS/ ATSC)
- Part No.: 4084670-001
- Model: NX-20A-GL
- Chiller Hoses

AC Power Controller Rack
- MFG Date: Dec 2009
- 208VAC

AC Dual Bias Generator Rack
- ENI Spectrum 11002 (0190-29586): 4 units
- ENI GHW-50A/ GHW50A-13DF3H0-005 (0190-15319): 4 units

Pump
- SWLL/Txfr: Adixen/ Alcatel A100L Applied Materials iPUP

User Interface(s) (UI):
- Flat Panel Monitor with keyboard on stand

Tool Status: Palletised, Currently warehoused, Inspection welcomed
가격
Please login and contact seller
등록자에게 문의하기
회원가입하시면,
장비 담당자와 직접 연락하실 수 있습니다.