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[SG10105] Nikon NSR-2205i11D Stepper 

Item No
FAB / Stepper
2010-08-25 11:52:25
Model: NSR2205i11D
Serial Number: 1105568
Vintage : 1996
Wafer Size: Flat type, 8 inch
Reticle Size: 6 inch
Chamber Temperature: 22.2 C
Lens Type: 5iB5
Wafer Size / Type: Prealignment Orientation: 6:00
Wafer Loader Type: Type 2
Reticle Microscope Compatibility: 22.0 mm
Wafer Observation System Theta
Prealignment 2
Total Overlay: Yes, up to 20 NSRs
Extended Wafer Carrier Table
Pellicle Particle Detector
Wafer Edge Exposure System (WEES)
Reticle Bar Code Reader
Reticle Cases: Anti-static Type M2
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