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[SG12515] TEL UnityⅡ e85 DD ETCHER 

Item No
FAB / Etcher
2010-05-03 12:17:03
Model: UnityⅡ e85 DD
Serial No : U00951
Vintage: 1999
Machine code: M7BEPC215
ECC Rack: V-1 Rack
Wafer size: 8 Inch
Chamber : 2 chamber DRM
Robot Arm: Ceramic
ESC: Ceramic

* Dry Pump and Chiller are not Include.
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