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[SG12626] ASML PAS5500/300B STEPPER 

Item No
FAB / Stepper
2010-08-25 12:14:25
Serial No : 5323
Vintage: 1997.7
Report Date: January 26, 2009 03:00
Sales Config Report For Machine: 5323
Config Item Value
Cassette (elevator) position Cassette position 1 and 2
Wafer Track Interface TEL Mark 5/7/8/ACT8
SECS I and II Interface Yes
SECS Job Creator Yes
Batch streaming Advanced RMS
E-Chuck Analysis Standard
Image quality control Standard
Tape streamer OCU-MK4 or less Yes
Single Reticle Smif Handling Yes
SignALL Yes
IRIS-6 Inch Reticles Yes
PEP1 Standard
PEP2 Standard
Reticle Error Compensation Standard
Focal Standard
Extended NA-range Yes
Aerial Standard
Intensity 2 Yes
Quasar Yes (DOE ID13 MP4 30 included)
Extended Exposure Yes
Focus Spot Monitor Yes
PEP300B = /300B to /300C upgr Yes
Valid ATP-document 12NC 4022.502.42301
Hertz 60 Hertz
Power 220 Volt
Signal Tower Remote
Software release 5500 SW rel. 6.2.2
SPM Alignment Yes
Optical Prealign (Mark Sensor) Standard
Wafer size 200 mm
Wafer type Flat
Standard warranty 1 Year
Language indication KOR
CSR's for PAS5500 general Focus monitoring
Focus Spot Monitor Yes
Extended Exposure Yes
Factory release Sw rel. 6.2.0
AB matching Yes
Reference machine number 1176
Reticle size 6"
Super clean package Yes
XPA alignment Standard
Optical Prealign (Mark Sensor) Standard
LSQ disto modelling Standard
CSR's for PAS5500/300 old vari CSR 1089 ( T97-DUV-02-100 )
CSR's for PAS5500/300 old vari CSR 1191 ( T97-DUV-02-93 )
CSR's for PAS5500/300 old vari CSR 1192 ( T97-DUV-02-94 )
CSR's for PAS5500/300 old vari CSR 1194 ( T97-DUV-02-96 )

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