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[SG12646] KLA Tencor SFS-6220 Particle counter 

Item No
FAB / Metrology
2010-07-30 17:56:30
Maker : KLA Tencor
Item : Particle Counter(Unpatterned Wafer inspection)
Model :SFS-6220
Serial No : 0596-168
Vintage : 1997
Wafer Size : 8 inch
Remark : M7DPTA01
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