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[SG20349] Rudolph SL200XL AS-IS, Working 

Item No
FAB / Metrology
2012-10-09 14:17:09
Serial No :
Vintage : 2000
Wafer size : 8
Spec : ?Currently Configured for 200mm Wafer sizes
?MFG Date: May 2000
?Last PM Date: Mar, 2012
?Model: Vanguard Series SL200XL
?Cassette Interface: (2) Asyst Integrated SMIF
25-slot/cassette (Notch)
?Aligner (Flat/Notch finder)
?Robot Type: Brooks/Equipe PRI-200
?Spectrometer Type: Array
?Vision Processor: COGNEX
?Laser Wavelength(s): 633nm, 780nm, 905nm
?Stage Type: 8”
?GEM/SECS II Interface
?Computer: Pentium
3.5” Floppy Drive
CD-Rom Drive
?Backup Type: Jaz 2GB
?OS software: OS2 Warp 3.0
?Application SW: Rudolph 6.333S
?Power Requirements: V 220, 5A (4900VA), 2-Phase, Freq 50/60Hz

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