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[SG37559] KLA-Tencor EDR5210 Defect Review SEM 

Item No
37559
Category
FAB / Metrology
Date
2017-08-31 16:14:31
Serial Number
5040139
Vintage
2010
Wafer Size
12
Configuration
2xLoad port(Brooks FixLoad), Robot& Aligner(Brooks),TMP(Edward),Ion pump(Varian) Missing: HDD, ICA Dry Cool, Reset Power Supply
Price
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Contact Info
SurplusGLOBAL Korea Tel : 82-31-615-6800
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