[SG28527] Hitachi S-5200 FE-SEM
Metrology
[SG52657] KLA Spectra FX200 Film Thickness Measurement
[SG44954] AMAT Centura Avatar OX
Etch
[SG85057] AMAT Reflexion Oxide
CMP
[R95293] AMAT P5000 ILD BPTEOS
CVD
[SG59592] AMAT P5000 Metal
[SG95000] Teradyne IP750EMP
ATE
[SG35896] SUSSMicroTec MA200 Aligner
Stepper
[SG93887] TEL Mark8 COT/DEV
Track
[SG41680] SCREEN WS-820L WET
WET
[SG34049] SUSSMicroTec CBC200 Wafer Bonder
Packaging
[SG66811] ASM AD830 DIE BONDER
[SG94475] Novellus C3 Speed Max HDP
[SG27739] SCREEN AS2000 Oxide
[SG41909] Mattson ParadigmE Etch
[SG18518] Nikon OPTIPHOT 66 Microscope
Others
[SG83006] Canon FPA-5500iZa 350nm, i-Line Stepper
[SG38832] Canon FPA-5500iZ+ 350nm, i-Line Stepper
[SG82500] Accretech UF3000 Wafer Probing Machine
[SG48731] Canon FPA-5500iZ 350nm, i-Line Stepper
[SG28544] Rudolph Axi-S Macro Inspection
[SG40396] Rudolph NSX105 Macro Inspection
[SG36430] Nanometrics Caliper Mosaic Overlay
[SG95358] KLA KLA2135 Bright Field
[SG97553] KLA KLA2138 Bright Field
[SG62364] Hitachi RS6000 DR SEM
[SG62830] Hitachi S-5500 FE-SEM
[SG73720] KLA KLA2139 Bright Field Inspection
[SG28910] KLA EDR5210 DRSEM
[SG71924] KLA HRP-340 Surface Profilometer
[SG73699] Horiba PR-PD2 Reticle/Mask Particle Detection System
[SG41777] KLA Aleris CX Film Thickness Measurement
[SG95486] KLA Aleris HX8500 Thickness measurement
[SG81140] Hitachi CG4100 CD SEM
[SG24979] Kokusai VR-120SD Resistivity Measurement
[R24660] KLA SFS7700 Particle Counter
[SG71290] FEI DB835 Dual Beam SEM
[SG40314] Nanometrics Caliper Elan Overlay
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