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[SG12617] AMAT Centura 5200 eMax Oxide Etcher 

Item No
FAB / Etcher
2011-06-30 15:24:30
Serial No : 9030
Vintage : 1996
Spec : M7EAE605
Mainframe : Centura I
Load Lock : Narroow Body
Chamber :
2 x eMaX
1 x Orient
VHP+ Robot

** Pump & Chiller is optional
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Contact Info
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