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[SG12640] KLA Tencor SFS6220 Particle Counter 

Item No
FAB / Metrology
2010-07-07 16:37:07
Maker : KLA Tencor
Item : Particle Counter(Unpatterned Wafer inspection)
Model :SFS-6220
Serial No : 0596-167
Vintage : 1997
Wafer Size : 8 inch
Remark : M7PPT201

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