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Item No
FAB / Furnace
2014-09-24 12:29:24
Serial No: M00000125168
Vintage: 2001
WaferSize: 8
Specification: GFC(N2, O2, H2, N2O, HCL), 100Pc, N2 Loadclock, M-560A (4Zone), FTP Heater
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