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[SG21517] TEL Alpha - 8SE LPCVD Poly Furnace 

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Item No
21517
Category
FAB / Furnace
Date
2013-01-25 10:07:25
Serial Number
M00000445095
Vintage
2004
Wafer Size
8
Configuration
(PH3 SiH4 N2) Options (1) Signal Tower (2) Pitch Change Mechanism (3) UPS (4) GEM Communication N2 Load Lock Ambient Control Option--1 Quartz ware Load size 170 wafers Load lock purge system Process gas SiH4 PH3 Gas Type
Price
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Contact Info
SurplusGLOBAL Korea Tel : 82-31-615-6800
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