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[SG21532] KLA Tencor Viper 2401 Macro Inspection(non pattern) 

Item No
FAB / Metrology
2013-11-24 22:59:24
Serial No: 2199080725
WaferSize: 8
Specification: - Macro Defect Inspection System
- 80wph/200mm Throughput/Wafer
- 50탆 sensitivity
- Brightfield/Darkfield (Non)Patterned Inspection
- Edge Exclusion down to 1mm
- Dual cassette Brooks robot w/ pre-aligner
- Windows NT OS
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