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[SG21533] KLA Tencor Viper 2401 (non pattern) 

Item No
21533
Category
FAB / Metrology
Date
2013-11-24 22:59:24
Serial Number
2100120786
Wafer Size
8
Configuration
- Macro Defect Inspection System - 80wph/200mm Throughput/Wafer - 50탆 sensitivity - Brightfield/Darkfield (Non)Patterned Inspection - Edge Exclusion down to 1mm - Dual cassette Brooks robot w/ pre-aligner - Windows NT OS
Price
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Contact Info
SurplusGLOBAL Korea Tel : 82-31-615-6800
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