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[SG24550] LAM TCP9600SE Dry Etch 

Item No
24550
Category
FAB / Etch
Date
2015-08-18 14:08:18
Wafer Size
6
Configuration
TCP 9600 SE, some tool details: ? 3 Advanced Energy generator’s : 2.4 kW, calibrated to 1.25 kW at 10 Volts ? Turbomolecularpump : Alcatel ATH 1300 ? Pendulum Mainchamber Valve : VAT ? Pressure measurement : Mainchamber Baratron: 100mTorr / type E 29B MKS ? WVDS automatic supply system upgrade incl. (water vapor delivery system) ? APM and DSQ original LAM parts ? ESC chuck installed , no top clamping Tool on 6 “ , 8” conversion possible The tool is still in Fab (on cold idle) and can be audited.
Price
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Contact Info
SurplusGLOBAL Korea Tel : 82-31-615-6800
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