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[SG10470] AMAT Centura DPS plus (Under Refurbishiment) 

Item No
FAB / Etcher
2008-10-05 03:13:05
- Chamber A, B: DPS Plus
- Chamber C, D: N/A
- Chamber E, F: Cool Down, Orienter
- Load Lock : Centura I, Wide Body
Dual Loadlock Interface - None SMIF

Under refurbishment.
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