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[SG12516] TEL UnityⅡ e85 DD ETCHER 

Item No
FAB / Etcher
2010-05-04 19:33:04
Model: UnityⅡ e85 DD
Serial No : LLZ240
Vintage: 1996
Machine code:EPC217
ECC Rack: V-1 Rack
Wafer size: 8 Inch
Chamber : 2 chamber DRM
Robot Arm: Ceramic
ESC: Ceramic

* Dry Pump and Chiller are not Include.
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