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[SG15566] TEL Unity SCCM Oxide 

Item No
FAB / Etcher
2011-11-07 17:32:07
Serial No : U01898
Vintage : 2001
Spec :
Maker: TEL
Model: Unity 2e 85SS Oxide Etch system.
Wafer size:8 inch
Process chamber: 2 x SCCM chamber

** Pump & Chiller is optional
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