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[SG25228] KLA-Tencor SP1 DLS Particle counter 

Item No
FAB / Metrology
2014-03-19 10:11:19
Serial No: 0307-0407
Vintage: 2007
WaferSize: 8,12
Specification: operation condition.(Semi-Refurbished) Single open cassette type. S/W 4.2Ver.
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