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FAB > Stepper

[SG7762] TEL Clean Track ACT8 SOG 2 Block 

Item No
FAB / Stepper
2008-02-13 21:13:13
Serial : 9290492

Built Year : MAR. 1999
Location : SG
Quantity : 1
Condition : Good

Wafer 8" (200mm)
*Flow: Right-to-Left
*Cup: 2 cups
*Pump: 2 pumps
*Hot plate: 2 plates
*Cold plate: 3 plates
*Chemical cabinet: 2 units
*Solvent Tank: 5 Gallons
*Gas Sensor for N2
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