[SG78780] TEL Tactras Vigus-1 ETCH
Etch
[R52880] TEL Tactras Vigus-0 NCCP
[SG44954] AMAT Centura Avatar AVATA
[SG36639] BMR ICP Etcher ICP Etch
[SG80081] Lam 2300 Exelan Flex Oxide
[SG44971] AMAT Centura DPS2 Poly Poly
[SG41784] AMAT Centura DPS2 Metal Metal
[SG59592] AMAT P5000 Metal
[SG37553] TEL Alpha-303i-K MTO
Furnace
[SG42053] TEL Indy-A DCS Nit
[SG80898] TEL LITHIUS Pro COT/DEV
Track
[SG42491] TEL Trias SPA CVD
CVD
[SG44674] TEL LITHIUS COT/DEV
[SG45298] TEL Indy-B DCS Nit
[SG71904] TEL ACT8 Dual COT/DEV
[SG71770] TEL P-12XL
ATE
[SG35896] SUSSMicroTec MA200 Aligner
Stepper
[SG45728] ASML XT1250D ArF Scanner
Scanner
[SG28409] Rudolph 3Di8500 Wafer Inspection
Metrology
[SG28424] AMAT Endura CL PVD
PVD
[SG23869] AMAT Centura DPS2 532 Metal Metal
[SG37540] Mattson ParadigmE XP Light Etch
[SG59576] AMAT Centura Axiom Chamber clean
[SG71289] Lam 490 ZERO-ETCH
[SG41909] Mattson ParadigmE Etch
[R24643] Alcatel Alcatel Gir Dry Etch
[SG38176] Hitachi DM421P Etch
[SG46176] Axcelis Integra ETCH
[SG62450] AMAT Centura DPS2 AdvantEdge G5 Mesa HP Poly
[R70392] Lam 2300 Flex FX Gateline slit etch, TSGCUT Etch
[SG62233] Lam 2300 Versys Metal 45 ETCH
[R70393] AMAT Siconi R2 oxide recess etch
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