[SG40190] Canon FPA-6000 ES5 248nm, KrF Scanner
Scanner
[SG62251] Nikon NSR-S204B 150nm, KrF Scanner
[SG38832] Canon FPA-5500iZ+ 350nm, i-Line Stepper
Stepper
[SG80931] TEL ACT12 Dual COT/DEV
Track
[SG95143] Nikon NSR-SF130 280nm, I-Line Stepper
[SG78400] Teradyne Magnum SSV Memory Tester
ATE
[SG42053] TEL Indy-A DCS Nit
Furnace
[SG52592] Axcelis Optima HDx High Current Implanter
Implant
[SG71924] KLA HRP-340 Surface Profilometer
Metrology
[SG34050] SUSSMicroTec CB200M Wafer Bonder
Packaging
[SG86925] Semics OPUS3 Wafer Probing
[SG39974] Hitachi HD2300 STEM
[SG28527] Hitachi S-5200 FE-SEM
[SG44660] TEL LITHIUS COT/DEV
[SG28544] Rudolph Axi-S Macro Inspection
[SG24979] Kokusai VR-120SD Resistivity Measurement
[SG28409] Rudolph 3Di8500 Macro inspection
[SG71788] PSK Supra IV
Asher
[SG46176] Axcelis Integra ETCH
Etch
[SG17820] Axcelis RapidCure 320FC Radiator UV anneal system
[R95114] Nikon NSR-S208D 110nm, KrF Scanner
[R96759] ASML XT1900Gi 40nm, ArF Immersion Scanner
[SG79169] Nikon NSR-S307E 80nm, ArF Scanner
[SG29074] Nikon NSR-S609B 55nm, ArF Scanner
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