[SG44954] AMAT Centura Avatar AVATA
Etch
[SG41784] AMAT Centura DPS2 Metal Metal
[SG59592] AMAT P5000 Metal
[SG36639] BMR ICP Etcher ICP Etch
[SG80081] Lam 2300 Exelan Flex Oxide
[SG80708] TEL Telius SCCM Jin ETCHER, CU
[SG78780] TEL Tactras Vigus-1 ETCH
[R52880] TEL Tactras Vigus-0 NCCP
[SG28424] AMAT Endura CL PVD
PVD
[SG71143] AMAT Endura 2 PVD
[SG42138] AMAT UVision 4 Bright Field
Metrology
[SG80741] AMAT Centura Radiance 12" RTP
RTP
[SG50469] AMAT Producer SE ACL
CVD
[SG18125] AMAT P5000 PECVD
[SG35896] SUSSMicroTec MA200 Aligner
Stepper
[SG45728] ASML XT1250D ArF Scanner
Scanner
[SG28409] Rudolph 3Di8500 Wafer Inspection
[SG43383] Novellus Inova Chamber 300MM PVD
[SG48729] ASM Eagle12 CVD
[SG37553] TEL Alpha-303i-K MTO
Furnace
[SG23869] AMAT Centura DPS2 532 Metal Metal
[SG37540] Mattson ParadigmE XP Light Etch
[SG59576] AMAT Centura Axiom Chamber clean
[SG71289] Lam 490 ZERO-ETCH
[SG41909] Mattson ParadigmE Etch
[R24643] Alcatel Alcatel Gir Dry Etch
[SG38176] Hitachi DM421P Etch
[SG46176] Axcelis Integra ETCH
[SG62450] AMAT Centura DPS2 AdvantEdge G5 Mesa HP Poly
[R70392] Lam 2300 Flex FX Gateline slit etch, TSGCUT Etch
[SG62233] Lam 2300 Versys Metal 45 ETCH
[R70393] AMAT Siconi R2 oxide recess etch
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