[SG80931] TEL ACT12 Dual COT/DEV
Track
[SG81277] ASM AD830+ Die bonding
Packaging
[SG66675] Veeco K465 MOCVD
CVD
[SG82712] PSK Supra III ETCH
Asher
[SG42491] TEL Trias SPA CVD
[SG27739] SCREEN AS2000 Oxide
CMP
[SG80708] TEL Telius SCCM Jin ETCHER, CU
Etch
[SG34050] SUSSMicroTec CB200M Wafer Bonder
[SG43383] Novellus Inova Chamber PVD
PVD
[SG15579] Ulvac Ceraus ZX-1000 PVD
[SG94480] Nikon NSR-2205i11D CFA i-Line (5x)
Stepper
[SG44971] AMAT Centura DPS2 Poly Poly
[SG42895] Canon Anelva FC7100 PVD
[SG41909] Mattson ParadigmE Etch
[SG28527] Hitachi S-5200 FE-SEM
Metrology
[SG44954] AMAT Centura Avatar OX
[SG66811] ASM AD830 DIE BONDER
[SG80741] AMAT Centura 4.0 Radiance RTP
RTP
[R95960] AMAT Centura EPI BRCM SIGE
[SG80211] Teradyne iFLEX Final Tester
ATE
[SG83147] EBARA A150W-M CVD, Furnace, Etch, RTP
Parts
[SG83157] EBARA A150W-T CVD, Furnace, Etch, RTP
[SG83081] EBARA A70W CVD, Furnace, Etch, RTP
[SG82917] EBARA AA20 CVD, Furnace, Etch, RTP
[SG28201] Seiko Seiki STP-A2203 PVD
[SG83037] Edwards QDP80 CVD, Furnace, Etch, RTP
[SG83213] Affinity RAA-012K/R407C Chiller
[SG83103] NESLAB HX-150 CHILLER
[SG45757] NESLAB Steelhead1 Heat Exchanger
[SG83136] Edwards iH80 TFE
[SG89315] Edwards STP-A2203WV Pump
[SG84447] AMAT NSK DRIVER CMP
[SG83131] AMAT AMAT0 CHILLER
[SG80920] Siltrex Head Rotation Motor
[SG84186] ENI GHW-50A Oxide
[SG83075] EBARA A10S CVD, Furnace, Etch, RTP
[SG82977] Advanced Energy RF10S PVD
[SG83054] Edwards QDP40 CVD, Furnace, Etch, RTP
[SG85093] SMC INR-498-003B
[SG83086] EBARA A70W-N CVD, Furnace, Etch, RTP
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